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PET Filmの前処理 & Filmの熱収縮の調整 ＆ITO膜の連続結晶化
Smart film Vacuum Conditioner(SVC)はPET Filmの脱ガス・脱水分などの前処理及びFilmを無張力状態に加熱処理することで、Filmの熱収縮の調整（平坦化）、ITO膜の連続的な結晶化処理が可能な設備です。 ■装備特徴 • Flimを無張力で熱処理して0.1%以下の極低熱収縮Filmを生産 • 均一な基板温度に加熱可能 (基材の平坦化) • プラズマ区間（Treatment）がRewinding Chamberに位置してProcess Chamber•の高真空を維持 • Squeeze Valveを利用してProcess Chamberの真空を維持したまま、Winding Chamber Vent 及びFilmを交替 * 委託加工可能
Antiviral and antibacterial coating film for touch display
The latest photocatalytic technology enabled this transparent film to deactivate viruses and bacterial attached on its surface. This reaction is semi-permanently reproduced by irradiation of any light like sunlight and room light. To reduce the risk of contact infection, this film is widely used for coating public touch displays such as ATM screens.
Equipped with various film deposition, oxide layer, annealing
PBII is suitable for carbon film for pre-annealing of SiC, RTA is for annealing.
